ACCESS ARBITRATION SYSTEM FOR SEMICONDUCTOR FABRICATION EQUIPMENT AND METHODS FOR USING AND OPERATING THE SAME

摘要

The access coordination module includes a plurality of active component communication ports for communicating with a plurality of active components and a passive component communication port for communicating with the passive component. The access coordination module is also configured such that an authorized active component communication port among a plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and non-licensed active component communication of the plurality of active component communication ports. And switching logic adapted to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port such that ports are prevented from communicating with the passive component communication port at the given time.