机译:扩展知识混合Petri网的半导体制造流程建模方法
School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, P.R.China;
School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, P.R.China;
School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, P.R.China;
School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, P.R.China;
semiconductor wafer fabrication, knowledge, Petri nets, object-oriented methods;