ACCESS ARBITRATION SYSTEM FOR SEMICONDUCTOR FABRICATION EQUIPMENT AND METHODS FOR USING AND OPERATING THE SAME

摘要

The access coordination module includes a plurality of active component communication ports for communicating with the plurality of active components and a passive component communication port for communicating with the passive component. The access coordination module is further configured to cause an authorized active component communication port of the plurality of active component communication ports to be communicatively coupled with the passive component communication port at a given time, and to enable unlicensed active component communication of the plurality of active component communication ports. and switching logic adapted to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port such that ports are prevented from communicating with the passive component communication port at the given time.