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Method for manufacturing semiconductor package substrate and semiconductor package substrate manufactured using the same

机译:半导体封装基板的制造方法以及使用该半导体封装基板制造的半导体封装基板

摘要

The present invention is to form a groove or trench on one surface of a base substrate of a conductive material for a method of manufacturing a semiconductor package substrate and a semiconductor package substrate manufactured using the semiconductor device substrate, which can be easily connected to a semiconductor device while the process is simple. Step, filling the groove or trench with resin, and etching the other surface of the base substrate so that the resin filling the groove or trench is exposed, and on the exposed portion of the base substrate of the resin and the one surface of the base substrate. A semiconductor package substrate comprising forming an integral first conductive layer, and performing electroplating to form a second conductive layer on the other surface of the base substrate, and removing the first conductive layer. A manufacturing method and a semiconductor package substrate manufactured using the same are provided.
机译:本发明是在导电材料的基础衬底的一个表面上形成沟槽或沟槽,用于制造半导体封装衬底的方法以及使用该半导体器件衬底制造的半导体封装衬底,其可以容易地连接至半导体。设备,而过程很简单。步骤,用树脂填充凹槽或沟槽,并蚀刻基底基板的另一表面,以使填充凹槽或沟槽的树脂暴露,并且在树脂基底基板的暴露部分和基底的一个表面上基质。一种半导体封装基板,包括:形成一体的第一导电层;以及在所述基板的另一表面上进行电镀以形成第二导电层,以及去除所述第一导电层的步骤。提供一种制造方法和使用该方法制造的半导体封装基板。

著录项

  • 公开/公告号KR102141102B1

    专利类型

  • 公开/公告日2020-08-04

    原文格式PDF

  • 申请/专利权人 해성디에스 주식회사;

    申请/专利号KR20140003083

  • 发明设计人 배인섭;강성일;진민석;

    申请日2014-01-09

  • 分类号H01L23/13;

  • 国家 KR

  • 入库时间 2022-08-21 11:04:07

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