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MoNb MoNb TARGET MATERIAL

机译:MoNb MoNb目标材料

摘要

It solves the problem of high resistance generated in the underlying film or cover film of the thin wiring or electrode film, and the problem of nodules caused by the surface roughness of the target material in sputtering, and provides a flat image display device with stable TFT characteristics at low resistance. It provides a target material capable of forming a suitable MoNb thin film. It is a MoNb target material containing less than 1.0 Nb phases containing 5 atomic% to 30 atomic% Nb, having a composition consisting of Mo and inevitable impurities in the balance, and having a maximum length exceeding 70 μm per 200000 μm 2 of the sputtering surface. , It is preferable that the average equivalent circle diameter of the Nb phase is 15 µm to 65 µm.
机译:它解决了在薄布线或电极膜的下层膜或覆盖膜中产生高电阻的问题,以及由溅射中靶材的表面粗糙度引起的结节的问题,并提供了具有稳定的TFT的平面图像显示装置。低电阻时的特性。它提供了能够形成合适的MoNb薄膜的靶材。它是一种MoNb靶材,含有少于1.0 Nb的相,其中Nb含量为5原子%至30原子%,其组成由Mo和其余不可避免的杂质组成,每200000μm 2的最大长度超过70μm 的溅射表面。 Nb相的平均等效圆直径优选为15μm〜65μm。

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