首页> 外国专利> Device and method for determining the position of a particle beam

Device and method for determining the position of a particle beam

机译:确定粒子束位置的装置和方法

摘要

Device for determining the position of a particle beam (10), which a. a diaphragm (12) consisting of several diaphragm segments (12.1, 12.2, 12.3, 12.4) and b. a plurality of current measuring units which are each connected to a specific diaphragm segment (12.1, 12.2, 12.3, 12.4) in order to measure the electrical current flowing through the respective diaphragm segment (12.1, 12.2, 12.3, 12.4), characterized in that siec. at least one movement unit which is set up to move the diaphragm (12) relative to the beam in a plane through which the particle beam (S) passes.
机译:用于确定粒子束(10)位置的设备,其中隔膜(12),由多个隔膜段(12.1、12.2、12.3、12.4)和b。多个电流测量单元,每个电流测量单元连接到特定的膜片段(12.1、12.2、12.3、12.4),以便测量流过各个膜片段(12.1、12.2、12.3、12.4)的电流,其特征在于siec。至少一个运动单元,该运动单元被设置成在粒子束(S)穿过的平面内相对于束移动膜片(12)。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号