CHARGED PARTICLE BEAM SYSTEM, METHOD FOR DETERMINING RANGE FOR AUTOMATICALLY SEARCHING FOR FOCAL POINT POSITION IN CHARGED PARTICLE BEAM DEVICE, AND NON-TRANSITORY STORAGE MEDIUM RECORDING PROGRAM FOR CAUSING COMPUTER SYSTEM TO DETERMINE RANGE FOR AUTOMATICALLY SEARCHING FOR FOCAL POSITION IN CHARGED PARTICLE BEAM DEVICE

摘要

The present invention provides a technique for reducing the user's man-hours required for setting an automatic in-focus search function of an electron beam when reviewing defects using an electron microscope, and for facilitating the observation of a sample make it a task As a means for solving these problems, the present disclosure provides, in a charged particle beam system, from the width of the focus metric distribution for the focus position acquired in advance under the same conditions, and the difference between the focus positions before and after automatic in-focus position search, We provide a technology that automatically sets an appropriate focus position search width in consideration of convergence precision and operation time.