We recorded a program to determine the range for automatically searching for the focal position in a charged particle beam system, a charged particle beam device, and for a computer system to determine the range for automatically searching for a focal position in a charged particle beam device. Non-temporary storage medium

摘要

PROBLEM TO BE SOLVED: To provide a technique for reducing a user's man-hour required for setting an automatic in-focus search function of an electron beam and facilitating observation of a sample when reviewing a defect using an electron microscope. In the present disclosure, in a charged particle beam system, the convergence accuracy and the operation time are determined from the width of the focal measure distribution with respect to the focal position acquired in advance under the same conditions and the difference between the focal positions before and after the automatic focusing position search. We provide a technology to automatically set an appropriate focal position search width in consideration. [Selection diagram] FIG. 11