METHOD FOR CONTROLLING POSITION OF SAMPLE IN CHARGED PARTICLE BEAM DEVICE, PROGRAM, STORAGE MEDIUM, CONTROL DEVICE, AND CHARGED PARTICLE BEAM DEVICE

摘要

A scanning/transmission electron microscope (1) moves a sample (59) using an X-piezoelectric element (54), a Y-piezoelectric element (55), and a Z-piezoelectric element (65). The method for controlling the position of the sample (59) comprises: a first movement step for moving the sample (59) toward a target position; a second movement step for moving the sample (59) away from the target position, following the first movement step; and a third movement step for moving the sample (59) toward the target position, following the second movement step.