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一种大功率808nm DFB LD内置光栅的制备方法

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摘要

本发明利用全息光刻和湿法腐蚀工艺制备出适用于大功率808nm半导体激光器的分布反馈布拉格光栅，涉及半导体器件制造技术领域。其特征在于，利用金属有机化合物气相沉淀(MOCVD)技术在GaAs基上进行一次外延生长，利用曝光源为325nmHe-Cd激光器的全息曝光系统对已制备好的外延片进行曝光，经历显影、坚膜，最后利用体积配比为HCl:C

著录项

公开/公告号CN105406354A

专利类型发明专利
公开/公告日2016-03-16

原文格式PDF
申请/专利权人长春理工大学;
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申请/专利号CN201410468409.6
发明设计人曲轶;郭海侠;石宝华;高峰;李再金;李辉;乔忠良;张晶;
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申请日2014-09-15
分类号H01S5/12;
代理机构
代理人
地址 130022 吉林省长春市朝阳区卫星路7186号
入库时间 2023-12-18 14:54:42

法律信息

法律状态公告日

法律状态信息

法律状态
2018-03-30

发明专利申请公布后的视为撤回 IPC(主分类):H01S5/12 申请公布日:20160316 申请日:20140915

发明专利申请公布后的视为撤回
2016-03-16

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公开

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1. 一种大功率808nm DFB LD内置光栅的制备方法 [P] . 中国专利： CN105406354A . 2016-03-16
2. 一种808nm波段内置光栅泵浦源芯片 [P] . 中国专利： CN112217088A . 2021-01-12
3. A built-up product which is a model of the man made in the country or parts of the country or parts thereof, a built-up product which is built in a built-or built built in the country or parts thereof, a built-in country or parts thereof, a built-country country or parts thereof, or a built built built built in a country or a country, a built built-up product or a built built built built built built built built in a built built-up product, or a built built built built built built built built built built built in it, or a built built built built built built in a built built built built built built built built in a built built built in a country or built in it, or built in a built in a built built built in a built built country or built in a built built in a built in a country or built in a built built built in a built in a built in a built in a built country or built in a THEN [P] . CY1107042T1 . 2012-09-26

机译：仿冒产品，该仿冒产品是在该国家或地区或部分地区或部分地区制造的人的模型，一种仿造产品是在该国家或地区或部分地区内置或内置的，在一个国家或地区中的一部分，在一个国家或地区中的建筑物，或在一个国家或地区中建立的建筑物，建筑物或建筑物，建筑物或建筑物的建筑物产品，或内置的内置物，内置的内置物，内置的内置物，内置的内置物，或内置的内置物，内置的内置物，内置的内置物，内置的内置物，内置的内置物或内置的内置物，或建在某建筑物中;建在某建筑物中;建在某建筑物中;建在某建筑物中;建在某建筑物中;建在某建筑物中然后
4. (54) Title: SINGLE-FIBER MULTI-SPOT LASER PROBE FOR OPHTHALMIC ENDOILLUMINATION (57) Abstract: An ophthalmic endoilluminator is provided. The ophthalmic endoilluminator includes a light source, a first optical assembly, an optical coupling element, and an optical fiber having an optical grating located distally on the optical fiber, the optical fiber optically coupled to the optical coupling element. The first optical assembly receives and substantially collimates the white light. The optical coupling element receives the substantially collimated white light from the first optical assembly and directs tie light to an optical fiber. The optical grating couples to the distal end of the optical fiber, the optical grating having a surface relief grating, and an overlayer optically coupled to the surface relief grating. The optical grating is operable to substantially diffract incident light into N diffraction orders, the N diffraction orders having a substantially uniform intensity. [P] . IN2012MN01194A . 2012-08-24

机译：（54）标题：用于眼球内照明的单纤维多点激光探头（57）摘要：提供了一种眼科内照明器。眼科内照明器包括光源，第一光学组件，光学耦合元件以及在光纤的远端具有光栅的光纤，该光纤光学耦合至光学耦合元件。第一光学组件接收并基本准直白光。光学耦合元件从第一光学组件接收基本准直的白光，并将束缚光引导至光纤。所述光栅耦合到所述光纤的远端，所述光栅具有表面起伏光栅和光学耦合到所述表面起伏光栅的覆盖层。所述光栅可操作以将入射光基本衍射成N个衍射级，所述N个衍射级具有基本均匀的强度。
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机译：制造用于衍射光栅（版本）的液晶结构的方法，一种液晶衍射光栅，一种动态衍射光栅的方法