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Effect of a Physical Phase Plate on Contrast Transfer in an Aberration-Corrected Transmission Electron Microscope

机译:物理相位板对大气中对比度传递的影响   像差校正透射电子显微镜

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摘要

In this theoretical study we analyze contrast transfer of weak-phase objectsin a transmission electron microscope, which is equipped with an aberrationcorrector (Cs-corrector) in the imaging lens system and a physical phase platein the back focal plane of the objective lens. For a phase shift of pi/2between scattered and unscattered electrons induced by a physical phase plate,the sine-type phase contrast transfer function is converted into a cosine-typefunction. Optimal imaging conditions could theoretically be achieved if thephase shifts caused by the objective lens defocus and lens aberrations would beequal zero. In reality this situation is difficult to realize because ofresidual aberrations and varying, non-zero local defocus values, which ingeneral result from an uneven sample surface topography. We explore theconditions - i.e. range of Cs-values and defocus - for most favourable contrasttransfer as a function of the information limit, which is only limited by theeffect of partial coherence of the electron wave in Cs-corrected transmissionelectron microscopes. Under high-resolution operation conditions we find that aphysical phase plate improves strongly low- and medium-resolution objectcontrast, while improving tolerance to defocus and Cs-variations, compared to amicroscope without a phase plate.
机译:在这项理论研究中,我们在透射电子显微镜中分析了弱相物体的对比度传递,该透射电子显微镜在成像透镜系统中配备了像差校正器(Cs校正器),并在物镜的后焦平面中配备了物理相板。对于由物理相板引起的散射电子和未散射电子之间pi / 2的相移,正弦型相衬传递函数转换为余弦型函数。如果物镜散焦和像差引起的相移等于零,则理论上可以达到最佳成像条件。实际上,由于残留像差和变化的非零局部散焦值,通常很难实现这种情况,这通常是由于样品表面形貌不均匀造成的。我们探索了条件-即Cs值的范围和散焦-作为信息限制的函数的最有利的对比度转移,这仅受Cs校正的透射电子显微镜中电子波的部分相干效应的限制。与没有相位板的显微镜相比,在高分辨率操作条件下,我们发现,物理相位板可显着改善低分辨率和中分辨率物体的对比度,同时提高对散焦和Cs变化的容忍度。

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