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Three-section terahertz quantum cascade lasers with externally biased photonic lattices

机译:具有外部偏置光子晶格的三段太赫兹量子级联激光器

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摘要

Single-mode (SM) operation of terahertz (THz)-frequency quantum cascade lasers (QCLs) is essential for gas sensing and for their use as local oscillators. Whilst such SM operation has been demonstrated previously using distributed feedback gratings and photonic lattices (PLs), an ability to tune SM THz QCLs electronically would be highly desirable for many applications. This work investigates the electronic properties of multiple segment QCLs, and explores possible electronic tuning mechanisms. We have fabricated THz QCLs with PL gratings. Our THz QCLs, based on a bound-to-continuum active region design, were processed into 150-μm-wide surface-plasmon ridge waveguides with lengths 2.5–4.5 mm. The upper waveguide was then patterned into three sections. The outer sections were fully metallised with gold. In the central 530-μm-long section, however, the top n-doped layer was etched away and metallic PLs fabricated using electron-beam lithography, with grating pitch between 14.60 and 15.65 μm. In each device, both the PL and the outer sections were bonded separately to allow independent biasing. Devices were cooled in a continuous-flow helium cryostat and emission spectra measured using a Fourier-transform infrared spectrometer. Standard (unpatterned) devices lased with multiple Fabry–Pérot modes in the range 2.70–2.83 THz, whilst single mode emission was observed for devices patterned with a PL (Fig. 2). The emission spectra recorded from devices with PLs of different grating pitch showed stop-band behaviour, with the experimentally-determined stop-band bandwidth of around 25 GHz agreeing with the value of 23 GHz calculated using finite-element modelling. Light-output–current–voltage (LIV) characteristics were acquired under different configurations, including the central PL sections both biased and unbiased. An equivalent circuit model describing the electronic properties of the three-section devices was developed, and was found to reproduce the experimental observations well.
机译:太赫兹(THz)频率量子级联激光器(QCL)的单模(SM)操作对于气体感测及其用作本地振荡器至关重要。尽管先前已经使用分布式反馈光栅和光子晶格(PL)演示了这种SM操作,但对于许多应用,非常希望能够通过电子方式调谐SM THz QCL。这项工作调查了多段QCL的电子特性,并探讨了可能的电子调谐机制。我们已经用PL光栅制造了THz QCL。我们的THz QCL基于绑定到连续区域的有源区域设计,被加工成150-μm宽的表面等离子体激元脊形波导,长度为2.5-4.5 mm。然后将上波导图案化为三个部分。外部完全用金镀了金属。但是,在中心530μm长的区域中,顶部的n掺杂层被蚀刻掉了,并使用电子束光刻技术制造了金属PL,光栅间距在14.60和15.65μm之间。在每个器件中,PL和外部均分开粘合,以实现独立偏置。在连续流动的氦低温恒温器中冷却器件,并使用傅立叶变换红外光谱仪测量发射光谱。标准(无图案)器件在2.70–2.83 THz范围内发射了多个Fabry-Pérot模式的激光,而采用PL图案的器件则观察到单模发射(图2)。从具有不同光栅节距的PL的设备记录的发射光谱显示出阻带行为,实验确定的阻带带宽约为25 GHz,与使用有限元建模计算的23 GHz值一致。光输出-电流-电压(LIV)特性是在不同的配置下获得的,包括中央PL部分有偏和无偏。建立了描述三部分器件电子特性的等效电路模型,发现该模型可以很好地再现实验观察结果。

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