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A comparison of the predictions of a finite element model and multiscale model for a rough MEMS electrical contact

机译:对粗略mEms电接触的有限元模型和多尺度模型的预测的比较

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摘要

Rough surface contact is difficult to model effectively due to multiple scales of detail that need to be considered. This work presents the results of a multiscale rough surface contact model in comparison to a finite element based deterministic model for the electrical contact of a MEMS microswitch. The real area of contact and electrical contact resistance are predicted and compared as a function of normal load. The results show good quantitative and qualitative correlation between the two methods. As expected, the contact area increases nominally linearly with load, while the contact resistance decreases with load. It is notable though that the contact pressure is up to 16% higher than the hardness (2.8 times yield strength), and could be even higher for other surfaces.
机译:由于需要考虑多个细节尺度,因此很难有效地建立粗糙表面接触的模型。与基于有限元的MEMS微动开关电接触的确定性模型相比,这项工作提出了多尺度粗糙表面接触模型的结果。预测实际接触面积和电接触电阻,并将其作为正常负载的函数进行比较。结果表明两种方法之间良好的定量和定性相关性。正如预期的那样,接触面积随负载名义线性增加,而接触电阻随负载减小。值得注意的是,接触压力比硬度(屈服强度的2.8倍)高出16%,对于其他表面甚至更高。

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