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Lithographic Patterning Processes For Organic Electronics And Biomaterials

机译:有机电子和生物材料的光刻图案化工艺

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摘要

Organic electronics is a newly developed field that promises inexpensive, mechanically-flexible, large-area devices. Through the use of solution-processable organic materials, electronic devices can be fabricated on large-area, lightweight, flexible substrates to produce a new class of electronics. Patterning methods for organic electronics represents one of the major obstacles to be overcome in organic device fabrication. A high-resolution, high-throughput system with good registration capabilities is required to realize the potential for organic electronics, both in performance and commercialization. The well-established photolithographic patterning method has only been marginally useful in patterning organic electronic materials due to incompatibility issues between the organic materials and conventional lithographic processing solvents and resists. Many alternate patterning methods have thus been developed, however none of which are able to match photolithography in resolution and throughput. This thesis presents research performed toward the goal of developing lithographic patterning methods for organic electronic devices. Each section of this thesis describes a different resist system, which was developed for patterning organic electronic devices. All of the systems consist of fluorinated resist materials, which were designed and synthesized to be fully processable in hydrofluoroether solvents. These fluorinated materials and solvents can be used to lithographically pattern organic electronic devices in a high-resolution and highthroughput manner, without the typical incompatibility issues that exist between organic materials and conventional processing solvents and resists.
机译:有机电子学是一个新兴的领域,它有望提供廉价,机械灵活的大面积设备。通过使用可溶液处理的有机材料,可以在大面积,轻质,柔性的基板上制造电子设备,从而生产出新型的电子产品。有机电子器件的图案化方法代表了有机器件制造中要克服的主要障碍之一。需要具有良好配准能力的高分辨率,高通量系统,以实现有机电子产品在性能和商业化方面的潜力。由于有机材料与常规光刻处理溶剂和抗蚀剂之间的不相容性问题,众所周知的光刻图案化方法仅在图案化有机电子材料方面仅勉强有用。因此已经开发了许多替代的构图方法,但是没有一种方法能够在分辨率和生产能力上与光刻相匹配。本文提出了针对开发用于有机电子器件的光刻图案化方法的目标的研究。本文的每个部分都描述了不同的抗蚀剂系统,该系统是为图案化有机电子设备而开发的。所有系统均由氟化抗蚀剂材料组成,这些材料经设计和合成可在氢氟醚溶剂中完全加工。这些氟化材料和溶剂可用于以高分辨率和高通量方式对有机电子器件进行光刻图案化,而不会在有机材料与常规加工溶剂和抗蚀剂之间存在典型的不相容性问题。

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    Taylor Priscilla;

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  • 年度 2011
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