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Additive Soft-Lithographic Patterning of Submicrometer- and Nanometer-Scale Large-Area Resists on Electronic Materials

机译：电子材料上亚微米级和纳米级大面积抗蚀剂的附加软光刻图案

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Heejoon Ahn; Keon Jae Lee; Anne Shim; John A. Rogers; Ralph G. Nuzzo;
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年度 2005
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1. Additive soft-lithographic patterning of submicrometer- and nanometer-scale large-area resists on electronic materials [J] . Ahn H, Lee KJ, Shim A, Nano letters . 2005,第12期

机译：电子材料上亚微米和纳米级大面积抗蚀剂的加性软光刻构图
2. Photo-induced And Resist-free Imprint Patterning Of Fullerene Materials For Use In Functional Electronics [J] . Andrzej Dzwilewski, Thomas Wagberg, Ludvig Edman Journal of the American Chemical Society . 2009,第11期

机译：用于功能电子的富勒烯材料的光诱导和无抗蚀剂压印图案
3. Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors [J] . Heejoon Ahn, Keon Jae Lee, William R. Childs, Journal of Applied Physics . 2006,第8期

机译：通过贴花转移光刻和反应性离子束蚀刻在电子材料上的聚二甲基硅氧烷抗蚀剂的微米和亚微米图案化：在高迁移率薄膜晶体管的制造中的应用
4. Formation of Graphene p-n Junction Arrays Using Soft-lithographic Patterning and Cross-stacking [C] . Min Wook Jung, Wooseok Song, Sung Myung, International Conference on Materials and Manufacturing Research . 2015

机译：使用软光刻图案化和交叉堆叠形成石墨烯P-N结阵列
5. Materials for large-area electronics: Characterization of pentacene and graphene thin films by AC transport, Raman spectroscopy, and optics. [D] . Lenski, Daniel Roy. 2010

机译：大面积电子设备的材料：通过交流输运，拉曼光谱和光学器件表征并五苯和石墨烯薄膜。
6. An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists [O] . Brandon Hardie, Mark Roll 2017

机译：多金属氧酸盐杂化材料作为可图案化电介质和光刻胶的研究
7. Soft-lithographic patterning of functional oxide and composite materials [O] . Khan, Sajid 2010

机译：功能性氧化物和复合材料的软光刻图案
8. Scanning Probe Lithography. 3. Nanometer-Scale Electrochemical Patterning of Auand Organic Resists in the Absence of Intentionally Added Solvents or Electrolytes [R] . Schoer, J. K., Zamborini, F. P., Crooks, R. M. 1996

机译：扫描探针光刻。 3.在无意添加溶剂或电解质的情况下，纳米级电化学图案化auand有机抗蚀剂

Additive Soft-Lithographic Patterning of Submicrometer- and Nanometer-Scale Large-Area Resists on Electronic Materials

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