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US0065025A1: Cleaning of Plasma Chamber Walls Using Noble Gas Cleaning Step

机译：US0065025A1：使用稀有气体清洁步骤清洁等离子室壁

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United States patent application number US2009/0065025

机译：美国专利申请号US2009 / 0065025

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Urbanowicz Adam; Baklanov Mikhail; Shamiryan Denis; De Gendt Stefan;
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年度 2009
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正文语种 en
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专利

1. A Fundamental Study of Chamber Wall Cleaning in Plasmas [J] . fKouichiro Horiuchi 東北大学電通谈话会記録 . 2000,第1期

机译：等离子室腔壁清洁的基础研究
2. PUMP-DOWN CHARACTERISTICS OF OUTGASSED CLEAN STAINLESS STEEL VACUUM CHAMBER AND SURFACE ANALYSIS OF THE CHAMBER WALL [J] . Hirohata Y., Hino T., Yamashina T., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 1996,第6期

机译：洁净的不锈钢真空腔的抽气特性及腔壁的表面分析
3. Surgical Instrument Decontamination: Efficacy of Introducing an Argon:Oxygen RF Gas-Plasma Cleaning Step as Part of the Cleaning Cycle for Stainless Steel Instruments [J] . Baxter H.C., Campbell G.A., Richardson P.R., IEEE Transactions on Plasma Science . 2006,第4期

机译：外科手术器械净化：引入Argon：Oxygen RF气体-等离子体清洗步骤作为不锈钢器械清洗周期的一部分的功效
4. IN SITU CHAMBER CLEANING USING HALOGENATED-GAS PLASMAS EVALUATED BY EXTRACTED-PLASMA-PARAMETER ANALYSIS [C] . Kazuhide Ino, Iwao Natori, Akihiro Ichikawa, International Symposium on Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing . 2007

机译：使用提取的等离子体参数分析评估的使用卤化气等离子体进行原位室清洁
5. Investigation of clean diesel combustion with oxygenated fuels in a constant-volume combustion chamber using forward illumination light extinction technique. [D] . Xu, Yi. 2007

机译：使用前向照明消光技术研究恒定容积燃烧室中含氧燃料清洁柴油的燃烧。
6. Evaluation of four final irrigation protocols for cleaning root canal walls [O] . Qiang Li, Qian Zhang, Xiaoying Zou, 2020

机译：用于清洁根管壁的四种最终灌溉方案的评价
7. EP2034046A2: Improved cleaning of plasma chamber walls by adding of noble gas cleaning step [O] . Urbanowicz Adam, Baklanov Mikhail, Shamiryan Denis, 2009

机译：EP2034046A2：通过添加稀有气体清洁步骤，改善了对等离子体室壁的清洁

US0065025A1: Cleaning of Plasma Chamber Walls Using Noble Gas Cleaning Step

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