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Fabrication of Li2CO3-doped Thin Film Bulk Acoustic Resonator and Structural, Electrical Properties as a Function of Annealing Temperatures

机译：Li2CO3掺杂薄膜堆积声谐振器的制造作为退火温度的函数的结构，电性能

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4. Nano-structural Characteristics of N-doped ZnO Thin Films and Fabrication of Film Bulk Acoustic Resonator Devices [C] . E. J. Lee, R. R. Zhang, J. D. Park, International Conference on the Physics of Semiconductors . 2011

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Fabrication of Li2CO3-doped Thin Film Bulk Acoustic Resonator and Structural, Electrical Properties as a Function of Annealing Temperatures

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