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Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

机译：等离子体碳倾斜角度对碳涂层表面电容和形态学的影响

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I. V. Sudzhanskaya; А. I. Poplavsky; I. Yu. Goncharov; O. V. Glukhov;
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年度 2017
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Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

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