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Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ 0 thin films

机译：基于溅射非极性AL0.77SC0.23N 11 2的SAW谐振器中的机电耦合增强的机电耦合。0薄膜

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Anli Ding; Lutz Kirste; Yuan Lu; Rachid Driad; Nicolas Kurz; Vadim Lebedev; Tim Christoph; Niclas M. Feil; Roger Lozar; Thomas Metzger; Oliver Ambacher; Agnė Žukauskaitė;
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1. Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al_(0.77)Sc_(0.23)N (1120) thin films [J] . Anli Ding, Lutz Kirste, Yuan Lu, Applied Physics Letters . 2020,第10期

机译：基于溅射非极性Al_（0.77）Sc_（0.23）N（1120）薄膜的SAW谐振器中增强的机电耦合
2. Effective electromechanical coupling coefficient (kt(2)) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film [J] . Takeuchi M., Yamada H., Yoshino Y., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2002,第3a4期

机译：由ZnO薄膜制成的厚度扩展模式薄膜体声波谐振器的基本模式的有效机电耦合系数（kt（2））
3. Electrode influence on effective electromechanical coupling coefficient of thin film bulk acoustic resonators [J] . Zhang R., Jiao X. -Q., Yang J., Materials Research Innovations . 2014,第suppla4期

机译：电极对薄膜体声波谐振器有效机电耦合系数的影响
4. Non-Polar a-plane AlScN(1120) Thin Film Based SAW Resonators with Significantly Improved Electromechanical Coupling [C] . Anli Ding, Rachid Driad, Yuan Lu, IEEE International Ultrasonics Symposium . 2020

机译：非极性a平面AlScN（1120）薄膜声表面波谐振器，具有显着改善的机电耦合
5. Thin film integrated capacitors with sputtered-anodized niobium pentoxide dielectric for decoupling applications. [D] . Jacob, Susan. 2009

机译：用于去耦应用的具有溅射阳极氧化五氧化铌电介质的薄膜集成电容器。
6. Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator [O] . Guo-Hua Feng, Kuan-Yi Lee 2017

机译：在高浓度KOH溶液中生长的具有大机电耦合系数的水热合成PZT膜用于谐振器
7. High coupling piezoelectric thin films of Pb(Zr,Ti)O-3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators [O] . Yamauchi N., Shirai T., Yoshihara T., 2009

机译：用于GHz范围薄膜体声谐振器的Pb（Zr，Ti）O-3-基三元钙钛矿化合物的高耦合压电薄膜
8. Magnetron Sputtering System for Novel Intrinsically Switchable Thin Film Ferroelectric Resonators and Filters. [R] . A. Mortazawi V. Lee 2012

机译：新型本征可切换薄膜铁电谐振器和滤波器的磁控溅射系统。

Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ 0 thin films

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