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Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review

机译:由双光子聚合制备的束缚和不可渗透的3D微致动器:综述

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摘要

Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.
机译:可以将外部刺激转变为Microscale的机械运动的微循变器引起了广泛的关注,因为它们可用于构建微机电系统(MEMS)和/或微米,导致大量领域的广泛应用,例如非侵入性手术,靶向交货和生物医学机器。与古典2D MEMS器件相比,3D微耦合器为刺激响应功能装置的研究提供了一种新的平台。然而,基于光刻法的传统平面加工技术在3D微结构的构造中是不充分的。为了解决这个问题,研究人员提出了许多策略,其中3D激光打印是成为在微观尺度上创建智能设备的前瞻性技术,因为它的多功能性,可调节性和灵活性。在这里,我们根据不同的刺激审查用3D激光印刷制造的刺激响应3D微致动器的最新进展。然后,对3D激光印刷微致动器的设计,制造,控制和应用的前景,目的是为相关研究提供参考。

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