The nonuniform phase density distribution of the beam particles and its nonlinear dynamic simulation in the probe-forming system used to obtain distribution profiles of the beam current density on the target subject to the conditions of a probe formation. These conditions are determined by the change of initial distribution parameters of the phase density due to the variation of position and lens excitations of a doublet of electrostatic quadrupoles. This approach allows us to find probe-forming modes when parameters of initial distribution of the beam phase density are matching up to ion optical characteristics of the probe-forming system of a microprobe. Such matching gives increase of the current density and decrease of the beam size on a spot.
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