Selective NO2 gas sensing characteristics of sol-gel prepared MoO3-Wo3 thin films

摘要

Molybdenum trioxide - tungsten trioxide -(MoO3WO3) binary metal oxide thin films have been prepared by the sol-gel process. The films were deposited using the spin coating technique onto alumina substrates with interdigital electrodes and single crystal silicon substrates for electrical and micro characterization. Scanning Electron Microscopy (SEM) showed -MoO3WO3 film morphology composed of MoO3 needle like grains and WO3 spherical grains when annealed at 450°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO2).