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Preparation and temperature cycling reliability of electroless Ni(P) under bump metallization

机译:凸块金属化下化学镀Ni(p)的制备及温度循环可靠性

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摘要

The reliability of electroless Ni(P) under-bump metallization (UBM) was evaluated via temperature cycling and solder bump shear strength tests. Commercial diodes and dummy dies fabricated in-house were used as substrates for the electroless Ni(P) UBM deposition. Solder bumps were formed after reflowing eutectic 63Sn37Pb solder foils over the Ni(P) UBM. The solder bump shear strength was measured before and after different temperature cycling. The results from this study showed that the UBM thickness and dimension had important effects on the solder bump shear strength and reliability. Both the larger UBM dimension and larger UBM thickness tended to induce higher stress in the UBM, which resulted in the lower solder bump shear strength and lower temperature cycling reliability. A better UBM structure solution for high current electronic packaging application is indicated in this paper
机译:通过温度循环和焊料凸点剪切强度测试评估了化学镀Ni(P)凸块下金属化(UBM)的可靠性。内部制造的商用二极管和虚拟管芯被用作化学镀Ni(P)UBM的衬底。在Ni(P)UBM上回流共晶63Sn37Pb焊料箔后,形成焊料凸点。在不同温度循环之前和之后测量焊料凸块的剪切强度。这项研究的结果表明,UBM的厚度和尺寸对焊料凸点的剪切强度和可靠性有重要影响。较大的UBM尺寸和较大的UBM厚度都倾向于在UBM中引起较高的应力,这导致较低的焊料凸块剪切强度和较低的温度循环可靠性。本文提出了一种适用于大电流电子封装的更好的UBM结构解决方案

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