Large scale nuclear fusion and astronomy scientific programmes have increased the demandfor large freeform mirrors and lenses. Thousands of one metre class, high qualityaspherical optical components are required within the next five to ten years. Current manufacturingprocess chains production time need to be reduced from hundred hours to tenhours.As part of a new process chain for making large optics, an efficient low damage precisiongrinding process has been proposed. This grinding process aims to shorten thesubsequent manufacturing operations. The BoXR grinding machine, built by CranfieldUniversity, provides a rapid and economic solution for grinding large off-axis asphericaland free-form optical components.This thesis reports the development of a precision grinding process for rapid manufacturingof large optics using this grinding mode. Grinding process targets were; formaccuracy of 1 m over 1 metre, surface roughness 150 nm (Ra) and subsurface damagebelow 5 m. Process time target aims to remove 1 mm thickness of material over a metrein ten hours.Grinding experiments were conducted on a 5 axes Edgetek high speed grinding machineand BoXR grinding machine. The surface characteristics obtained on optical materials(ULE, SiC and Zerodur) are investigated. Grinding machine influence on surfaceroughness, surface profile, subsurface damage, grinding forces and grinding power arediscussed.This precision grinding process was validated on large spherical parts, 400 mm ULE andSiC parts and a 1 m Zerodur hexagonal part. A process time of ten hours was achieved usingmaximum removal rate of 187.5 mm3/s on ULE and Zerodur and 112.5 mm3/s on SiC.The subsurface damage distribution is shown to be "process" related and "machine dynamics"related. The research proves that a stiffer grinding machine, BoX, induces lowsubsurface damage depth in glass and glass ceramic.
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机译:大规模的核聚变和天文学科学计划增加了对大型自由曲面镜和透镜的需求。在未来的五到十年内,需要成千上万种级别的高质量非球面光学组件。当前的制造过程链的生产时间需要从数百小时减少到十个小时。作为制造大型光学器件的新过程链的一部分,提出了一种有效的低损伤精密研磨工艺。该研磨过程旨在缩短随后的制造操作。由克兰菲尔德大学(CranfieldUniversity)制造的BoXR研磨机为研磨大型离轴非球面自由曲面光学组件提供了一种快速经济的解决方案。本文报道了使用这种研磨模式快速制造大型光学器件的精密研磨工艺的发展。研磨工艺目标是:超过1米的1 m的大光度,150 nm(Ra)的表面粗糙度和5 m以下的亚表面损伤。加工时间目标旨在在十个小时内去除1毫米厚的材料。在5轴Edgetek高速磨床和BoXR磨床上进行了磨削实验。研究了在光学材料(ULE,SiC和Zerodur)上获得的表面特性。讨论了磨床对表面粗糙度,表面轮廓,亚表面损伤,磨削力和磨削能力的影响。该精密磨削工艺已在大型球形零件,400 mm ULE和SiC零件以及1 m Zerodur六角形零件上得到了验证。使用ULE和Zerodur的最大去除速率为187.5 mm3 / s,而SiC的最大去除速率为112.5 mm3 / s,可以达到十小时的处理时间。地下损伤的分布与“工艺”有关,与“机械动力学”有关。研究证明,更坚硬的磨床BoX可以在玻璃和玻璃陶瓷中引起较低的亚表面破坏深度。
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