POLISHING-GRINDING - AN INNOVATION FOR MANUFACTURING OF HIGH PRECISION OPTICS

摘要

ELID-Grinding offers a new approach for the grinding technology. It allows the stable employment of grinding wheels with very small grit sizes below 7 μm in diameter. However, material removal mechanism are more diversified than in any other conventional grinding process. It is a combination of many mechanism which can be found in grinding as well as in polishing processes. Within this paper two major mechanically based removal mechanism have been discussed. Still under investigation is the chemically induced influence of ELID on the material removal process. The ELID technology has shown an impact on steel, metaf carbides and ceramics. The highest influence however could be seen on optical glass. Future work will focus in particular on the polishing behavior - mechanically and tribo-chemically - of the formed oxide layer within the ELID-process.