首页> 外国专利> DROPLET DISCHARGE APPARATUS HAVING COORDINATE PRECISION CONFIRMING DEVICE, COORDINATE PRECISION CONFIRMING METHOD, METHOD OF MANUFACTURING ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC DEVICE

DROPLET DISCHARGE APPARATUS HAVING COORDINATE PRECISION CONFIRMING DEVICE, COORDINATE PRECISION CONFIRMING METHOD, METHOD OF MANUFACTURING ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC DEVICE

机译:具有协调精度确认装置的液滴排放装置,协调精度确认方法,制造光电装置的方法,光电装置以及电子装置

摘要

PROBLEM TO BE SOLVED: To provide a droplet discharge apparatus having a coordinate precision confirming device capable of previously grasping the precision of discharging a droplet to a work and capable of shortening the adjustment time of the apparatus by reducing the practical discharge tests of the droplet to the work.;SOLUTION: The coordinate precision confirming device is provided with a coordinate precision confirming member 40 held by a table 30 and having a pattern 41 comprising a plurality of marks M aligned with a prescribed pitch along a 1st movement axis X and a 2nd movement axis Y, an image pick-up element 51 moving along the 1st moving axis X and for imaging the mark M for the coordinate precision confirming member 40 held by the table 30 and a control section 200 for confirming the coordinate precision by obtaining error along the 1st movement axis X and the 2nd movement axis Y to the center position CM of the mark M in the picked up image obtained in the image pick-up element 51.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:提供一种液滴喷出装置,其具有坐标精度确认装置,该装置能够预先掌握将液滴喷出到工件的精度,并且能够通过减少液滴的实际喷出试验而缩短装置的调整时间。解决方案:坐标精度确认装置具有由工作台30保持的坐标精度确认部件40,该坐标精度确认部件40具有图案41,该图案41包括沿着第一移动轴X和第二移动轴以规定的间距对准的多个标记M。移动轴Y,沿第一移动轴X移动,用于使工作台30所保持的坐标精度确认部件40的标记M成像的摄像元件51,以及通过沿误差获得误差来确认坐标精度的控制部200在图像拾取器e中获得的拾取图像中,第一移动轴X和第二移动轴Y至标记M的中心位置CM条款51 .;版权:(C)2006,JPO&NCIPI

著录项

  • 公开/公告号JP2005270800A

    专利类型

  • 公开/公告日2005-10-06

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20040087621

  • 发明设计人 YASU NAGATANE;

    申请日2004-03-24

  • 分类号B05C5/00;H05B33/10;H05B33/14;

  • 国家 JP

  • 入库时间 2022-08-21 22:32:34

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