Semiconductor Measurement Technology: A Collection of Computer Programs for Two-Probe Resistance (Spreading Resistance) and Four-Probe Resistance Calculations, RESPAC.

摘要

The report presents and describes a number of FORTRAN programs which may be used to perform two-probe resistance (spreading resistance) and four-probe resistance calculations for vertically nonuniform resistivity structures. These programs fall into three general categories. They are: (1) programs for calculating the two-probe resistance (spreading resistance) from the resistivity profile, (2) programs for calculating the resistivity profile from the two-probe resistance (the inverse of (1), and (3) programs for calculating the four-probe resistance from the resistivity profile. Programs in the first and third category are useful for understanding the effects of resistivity variations on the two-probe resistance (spreading resistance) and the four-probe resistance. Programs in the second category are useful for extracting the resistivity profile from spreading resistance data (either measured or calculated). All of the programs are based upon the Schumann and Gardner solution of the multilayer Laplace equation. As such, local charge neutrality is assumed. The limitations of this assumption are described in the text.