Integrated Silicon Spectrometer: Fabricated Using Bulk-Micromachining Techniques

摘要

Equipment for optical spectral analysis finds widespread application in scienceand industry. Miniaturized spectrometers reveal new applications. This thesis describes the design, fabrication, and characterization of a miniaturized, fully integrated spectrometer in silicon for application in the visible part of the spectrum (380-703 nm). Fabrication of the sensor device in silicon enables integration of electronic circuitry on-chip. Light incident on the integrated dispersive element, a grating, is deflected at a wavelength-dependent angle when passing through it. The resulting spectrum that is spatially distributed is projected, after traversal of the optical path, onto the integrated linear photodiode array where the presence and intensity of the spectral components is detected.