Acoustic Loss Mechanisms in Leaky Saw Resonators on Lithium Tantalate.

摘要

The authors discuss acoustic losses in synchronous leaky surface-acoustic resonators on rotated Y-cut lithium tantalate substrates. Laser probe measurements and theoretical methods are employed to identify and characterize the radiation of leaky waves into the busbars of the resonator and the excitation of bulk-acoustic waves. Escaping LSAWs lead to a significant increase in the conductance, typically occurring in the vicinity of the resonance and in the stopband, but they do not explain the experimentally observed deterioration of the electric response at the antiresonance. At frequencies above the stopband the generation of fast shear bulk-acoustic waves is the dominant loss mechanism.