Evaluation of Four Analytical Methods for Determining Boron Trifluoride Concentrations

摘要

The development of a reliable analytical method for monitoring boron-trifluoride (7637072) (BF3) concentrations was reported. Four different methods were developed and evaluated. Method 1 used tetrafluoroborate specific ion electrodes for determining BF3 concentrations collected by impinger techniques. Method 2 was the carmine approach for the colorimetric monitoring of low chamber concentrations of BF3. Method 3 involved the quantitative determination of low concentrations of BF3 using infrared techniques. Method 4 involved the quantitative determination of low concentrations of BF3 using atomic absorption techniques.