MANUFACTURING METHOD OF BORON TRIFLUORIDE GAS CAPABLE OF MANUFACTURING THE BORON TRIFLUORIDE GAS BY PYROLYSIS

摘要

PURPOSE: A manufacturing method of boron trifluoride gas is provided to safely and simply manufacture the boron trifluoride gas by using an indirect or a direct heating method, and to reduce the number of manufacturing costs and danger for processing.;CONSTITUTION: A manufacturing method of boron trifluoride gas comprises the following steps: heating raw material compound selected from LiBF4, KBF4, NaBF4, and HBF4; thermally decomposing the raw material; and separating the decomposed raw material. The raw material is NaBF4 or KBF4. A heating process of the raw material is performed in 1000-3500°C. A heating process is used with an electric furnace, gas flame or plasma.;COPYRIGHT KIPO 2010