Semiconductor Measurement Technology: An Automated Photovoltaic System for the Measurement of Resistivity Variations in High-Resistivity Circular Silicon Slices

摘要

This report describes an automated photovoltaic system for nondestructive measurement of resistivity variations of high-resistivity circular silicon slices. The computer-based system for making the measurements is described, detailed construction diagrams are given to facilitate reproduction of the system, and a listing of the computer program for controlling the system is given. Comparisons between resistivity profiles determined using the automated photovoltaic system and the four-probe technique indicate that the photovoltaic system is adequate for production screening and incoming inspection of high-resistivity float-zoned silicon slices.