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In-Situ Stress Measurement of Single and Multilayer Films for X-Ray Astronomy Optical Applications.

机译：用于X射线天文光学应用的单层和多层膜的原位应力测量。

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作者
Broadway, D.; Ramsey, B.; O'Dell, S.; Gurgew, D.;
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年度 2017
页码 1-18
总页数 18
原文格式 PDF
正文语种 eng
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关键词
X ray astronomy; Stress measurement; Sensitivity; Optical coatings; Fiber optics; Thin films; Displacement; Polycrystals;

机译：X射线天文学;应力测量;灵敏度;光学涂层;光纤;薄膜;位移;多晶;

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专利

1. Magnetostriction and in-situ measurement of stress of Co/Pd compositionally modulated multilayer films during fabrication [J] . Awano H., Suzuki Y. IEEE Transactions on Magnetics . 1990,第5期

机译：Co / Pd复合调制多层膜在制造过程中的磁致伸缩和应力原位测量
2. Microstructure and Residual Stress Measurement of Ag/Glass Thin Films Using In-Situ High-Temperature X-ray Diffraction [J] . Zolanvari A., Hasansagha S., Eshaghi F., Armenian Journal of Physics . 2016,第1期

机译：Ag /玻璃薄膜的原位高温X射线衍射法测量其微结构和残余应力
3. Residual Stress and In-situ Thermal Stress Measurements of Copper Films on Glass Substrate [J] . Takao HANABUSA, Masayuki NISHIDA Materials Science Research International . 2001,第1期

机译：玻璃基板上铜膜的残余应力和原位热应力测量
4. In-situ stress measurement of single and multilayer thin-films used in x-ray astronomy optics applications [C] . David M. Broadway, Brian D. Ramsey, Stephen L. ODell, Optics for EUV, X-Ray, and Gamma-Ray Astronomy . 2017

机译：用于X射线天文学应用的单层和多层薄膜的原位应力测量
5. In-situ curvature and stress analyses for sputtered tungsten silicide/silicon multilayer thin films on silicon wafers. [D] . MacArthur, Kimberly Caitlin. 2010

机译：硅晶片上溅射的硅化钨/硅多层薄膜的原位曲率和应力分析。
6. Multilayer thin-film phantoms for axial contrast transfer function measurement in optical coherence tomography [O] . Anant Agrawal, Chao-Wei Chen, Jigesh Baxi, 2013

机译：用于光学相干断层扫描中轴向对比度传递函数测量的多层薄膜体模
7. The optimization of optical thin films deposition using in-situ reflectivity measurements and simulation [O] . Bhatt G.G., Kheraj V., Desai M.S., 2011

机译：利用原位反射率测量和模拟优化光学薄膜沉积

In-Situ Stress Measurement of Single and Multilayer Films for X-Ray Astronomy Optical Applications.

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