Measurement of the Configuration of a Concave Surface by the Interference of Reflected Light

摘要

A method whereby a concave surface is irradiated with coherent light and the resulting interference fringes yield information on the concave surface is described. This method can be applied to a surface which satisfies the following conditions: (1) the concave face has a mirror surface; (2) the profile of the face is expressed by a mathematical function with a point of inflection. In this interferometry, multilight waves reflected from the concave surface interfere and make fringes wherever the reflected light propagates. Interference fringe orders. Photographs of the fringe patterns for a uniformly loaded thin silicon plate clamped at the edge are shown experimentally. The experimental and the theoretical values of the maximum optical path difference show good agreement. This simple method can be applied to obtain accurate information on concave surfaces.