Method for determining flatness and parallelism of two measurement surfaces of micrometer screw, involves irradiating light to other measurement surface of reflected light, and detecting interference pattern of emitted light

摘要

The method involves positioning a flat glass (1) between two measurement surfaces (2,3) facing each other, and projecting glass beyond one of surfaces along the direction reciprocated to projection regions (6a-6d). The wavelength of light is irradiated by one region on other surface over which flat glass is arranged opposite to regions. The light is irradiated to other surface of reflected light through other region. The interference pattern of emitted light is detected, flatness of other surface on which light is irradiated is determined, and parallelism of surfaces is determined. An independent claim is included for device for determining flatness and parallelism of two measurement surfaces.