Measurement of Chemical Compositon with High Spatial Resolution Using a Dedicated Scanning Transmission Electron Microscope

摘要

The principal features of the recently installed VG HB501 dedicated scanning transmission electron microscope are described. The instrument has a high brightness electron source capable of producing a focused probe with a typical diameter of approximately 1 nm. Chemical composition on this scale is obtained by measuring the X-ray signals excited in a thin specimen, using the energy dispersive method. Examples are given which illustrate the performance of the instrument for examination of metals, semiconductors and catalysts.