Elemental and Chemical Analysis with High-Spatial Resolution using Electron Energy-Loss Spectroscopy in Transmission Electron Microscope

摘要

Microanalysis using electron energy-loss spectroscopy (EELS) in transmission electron microscope (TEM) is briefly reviewed. The method and the experimental results of elemental mapping and chemical analysis are shown. The detection limit, spatial resolution and practical aspects in TEM-EELS are also presented.