The design and fabrication of a single leakage-channel grating coupler

摘要

The modeling and fabrication is described of waveguide grating couplers with out-coupling efficiencies into a single diffracted order nearing 100 pct. Termed Single Leakage Channel Grating Couplers (SLCGCs), these devices use a high reflectivity dielectric stack to reflect the out-coupled beam diffracted toward the substrate, back up into the air region where it constructively adds with the beam diffracted into the air region. Computer modeling shows that the branching ratio and the leakage rate can be independently controlled, and that the branching ratio is independent of grating depth and grating period. A SLCGC with a branching ratio of 97.1 pct. was fabricated using a combination of vacuum evaporation and wet chemical techniques.