METHOD OF FABRICATION FOR AN ASYMMETRIC BRAGG COUPLER-BASED POLYMERIC WAVELENGTH FILTER WITH SINGLE-GRATING WAVEGUIDE

摘要

The present invention discloses a method for fabricating polymeric wavelength filter based on an asymmetric Bragg coupler with single-grating waveguide. The asymmetric waveguide coupler is formed firstly on a negative photo-resist mold. PDMS film is injected into the narrow waveguide of the coupler to act as a protection layer. The gratings pattern is exposed on the alternative waveguide and subsequently transferred to PDMS stamp mold. The PDMS stamp mold is used as a stamp to transfer the gratings pattern of the ABC wavelength filter onto UV cured polymer to form the final ABC filter. Whereby, the fabrication process is reliable and accurate, and can offer great potential for mass production of the ABC filter with single-grating waveguide.