A piezoelectric microvalve for micropropulsions

机译：用于微脉冲的压电微阀

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Yang, E. H.;
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年度 2002
页码 1-2
总页数 2
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
MICROELECTROMECHANICAL SYSTEMS; MICROINSTRUMENTATION; PIEZOELECTRICITY; PROPULSION; VALVES; MEMS NEMS space NASA JPL valve micro-propulsion micro-instruments TRL PICOSAT;

机译：微电子机械系统; mICROINsTRUmENTaTION;压电;推进;阀门; mEms NEms太空美国宇航局JpL气门微型推进微型仪器TRL pICOsaT;

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2. Characterization on the fatigue performance of a piezoelectric microvalve with a microfabricated silicon valve seat [J] . Jianlu Lv, Yonggang Jiang, Deyuan Zhang, Journal of Micromechanics and Microengineering . 2014,第1期

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3. A New Microvalve for Piezoelectric Microfluidic Devices Activated by Surface Acoustic Wave [J] . Zhang An-Liang, Fu Xiang-Ting, Zha Yan Ferroelectrics . 2014,第Null期

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4. Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated micropropulsion [C] . Eui-Hyeok, Yang, Choonsup Lee, IEEE Annual International Conference on Micro Electro Mechanical Systems . 2003

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5. Design, modeling, fabrication, and testing of a multistage micro gas compressor with piezoelectric unimorph diaphragm and passive microvalves for microcooling applications. [D] . Thanhson, Shawn. 2017

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6. Proportional Microvalve Using a Unimorph Piezoelectric Microactuator [O] . Arun Gunda, Gürhan Özkayar, Marcel Tichem, 2020

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7. A PIEZOELECTRIC MICROVALVE FOR MICROPROPULSION [O] . Eui-hveok Yanq, Nishant Rohatgi, Larry Wild 2015

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8. A piezoelectric microvalve for micropropulsion [R] . Yang, E., Rohatgi, N., Wild, L. 2002

机译：用于微脉冲的压电微阀

A piezoelectric microvalve for micropropulsions

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