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Piezoelectric drive device and microvalve with piezoelectric drive device

机译:压电驱动装置及具有压电驱动装置的微型阀

摘要

The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive.
机译:压电驱动器技术领域本发明涉及一种压电驱动器,特别是用于微型阀的压电驱动器。该驱动器包括在一侧上耦合到压电层的变形层,该变形层设置有至少一对电极,该至少一对电极由极性相反的两个电极制成,以提供电力。根据本发明,一对电极中的相反极性的两个电极一起布置在压电层的背离变形层的一侧上。本发明还涉及一种微型阀,该微型阀包括至少一个阀通道和打开或关闭该阀通道的膜,其中该膜同时形成这种压电驱动器的变形层。

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