Synchrotron X-Ray Midrodiffraction Analysis of Proton Irradiated Polycrystalline Diamond Films

摘要

X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2x10(sup 17) H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of l0(sup -3), was introduced into the film near the End of Range (EOR) region of the protons.