Development of backscattered electron Kikuchi patterns for phase identification in the SEM

摘要

This paper describes the use of backscattered electron Kikuchi patterns (BEKP) for phase identification in the scanning electron microscope (SEM). The origin of BEKP is described followed by a discussion of detectors capable of recording high quality patterns. In this study a new detector based on charge coupled device technology is described. Identification of unknown phases is demonstrated on prepared and as received sample surfaces. Identification through a combination of energy dispersive x-ray spectrometry (EDS) and BEKP of a Laves phase in a weld in an alloy of Fe-Co-Ni-Cr-Nb and the identification of Pb(sub 2)Ru(sub 2)O(sub 6.5) crystals on PZT is demonstrated. Crystallographic phase analysis of micron sized phases in the SEM is a powerful new tool for materials characterization.