Low power, tight seal, polyimide electrostatic microvalve

摘要

An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 (mu)m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.