Metrology of a mirror at the Advanced Photon Source: comparison between optical and x-ray measurements

摘要

This paper describes metrology of a vertically focusing mirror on the bending magnet beamline in sector-1 of the Advanced Photon Source, Argonne National Laboratory. The mirror was evaluated using measurements from both an optical long trace profiler and x-rays. Slope error profiles obtained with the two methods were compared and were found to be in a good agreement. Further comparisons were made between x-ray measurements and results from the SHADOW ray-tracing code.