Novel laser doppler linear encoder using multiple-reflection optical design for high-resolution linear actuator.

摘要

A novel laser Doppler linear encoder system (LDLE) has been developed at the Advanced Photon Source, Argonne National Laboratory. A self-aligning 3-D multiple-reflection optical design was used for the laser Doppler displacement meter (LDDM) to extend the encoder system resolution. The encoder is compact (about 70 mm(H) x 100 mm(W) x 250 mm(L)) and it has sub-Angstrom resolution, 100 mm/sec measuring speed, and 300 mm measuring range. Because the new device affords higher resolution, as compared with commercial laser interferometer systems, and yet cost less, it will have good potential for use in scientific and industrial applications.