Novel laser Doppler linear encoder using multiple-reflection optical design for a high-resolution linear actuator

摘要

Abstract: A novel laser Doppler linear encoder system (LDLE) hasbeen developed at the Advanced Photon Source, ArgonneNational Laboratory. A self-aligning 3-Dmultiple-reflection optical design was used for thelaser Doppler displacement meter (LDDM) to extend theencoder system resolution. The encoder is compact$LB@about 70 mm(H) $MUL 100 mm(W) $MUL 250 mm(L)$RB andit has sub-Angstrom resolution, 100 mm/sec measuringspeed, and 300 mm measuring range. Because the newdevice affords higher resolution, as compared withcommercial laser interferometer systems, and yet costless, it will have good potential for use in scientificand industrial applications. !11