Aluminum films 10 µm thick with a thickness uniformity in the one percent range have been obtained on the Kapton surface of a laminated substrate consisting of Kapton/Kapton/aluminum foil bonded with a thermosetting adhesive. The processing of the substrates before deposition necessary to obtain reasonable deposition cycle times and a minimal amount of deposition system contamination was developed. The laminated substrates required bakeouts both at atmosphere and in high vacuum prior to deposition to permit evaporation at a pressure of 0.1 mPa (1 X 10-6 torr). The deposited films exhibited a high specular reflectance and were thus mirror-like in appearance. Film resistivity was within 10 percent of that of bulk aluminum, and the films displayed a strong (III) fiber texture.
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