Photochemical Dry Etching of Semiconductors and Its Relationship to Semiconductor Electronic Properties

摘要

The general utility and selectivity of those photochemical dry etching processes which require direct participation of photogenerated carriers is largely determined by the electronic properties of the semiconductor. The laser which is used to produce the carriers responsible for etching can also provide in situ measurement of some of the important electronic properties which influence the etching process. (ERA citation 12:009492)