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Growth mechanisms of CVD diamond films determined by a novel TEM technique.

机译：用新型TEm技术测定CVD金刚石薄膜的生长机理。

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This report discusses a new technique for the examination of diamond films by transmission electron spectroscopy. Growth mechanisms of the materials are investigated. (JL)

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作者
Z. L. Wang J. Bentley R. E. Clausing L. Heatherly L. L. Horton;
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年度 1991
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Chemical Vapor Deposition; Crystal Defects; Diamonds; EDB/360602; Meetings; Microstructure; Thin Films; Transmission Electron Microscopy;

机译：化学气相沉积;晶体缺陷;金刚石; EDB / 360602;会议;微结构;薄膜;透射电子显微镜;

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1. Atomic scale KMC simulation of {100} oriented CVD diamond film growth under low substrate temperature ―Part Ⅱ Simulation of CVD diamond film growth in C-H system and in Cl-containing systems [J] . Xizhong An, Yu Zhang, Guoquan Liu, Journal of University of Science and Technology Beijing . 2002,第6期

机译：在低衬底温度下{100}取向CVD金刚石膜生长的原子尺度KMC模拟-第二部分C-H系统和含Cl体系中CVD金刚石膜生长的模拟
2. Atomic scale KMC simulation of{100}oriented CVD diamond film growth under low substrate temperature -part I simulation of CVD diamond film growth under Joe-Badgwell-Hauge model [J] . Xizhong An, Yu Zhang, Guoquan Liu Journal of University of Science and Technology Beijing . 2002,第5期

机译：在低衬底温度下{100}取向的CVD金刚石膜生长的原子尺度KMC模拟-第一部分，Joe-Badgwell-Hauge模型下的CVD金刚石膜生长的模拟
3. Atomic scale KMC simulation of {100} oriented CVD diamond film growth under low substrate temperature—Part I simulation of CVD diamond film growth under Joe—Badgwell—Hauge model [J] . Xizhong, YuZhang, 等北京科技大学学报：英文版 . 2002,第005期

机译：在低衬底温度下{100}取向CVD金刚石膜生长的原子尺度KMC模拟-第一部分，Joe-Badgwell-Hauge模型下CVD金刚石膜生长的模拟
4. Investigation of Growth Processes and Surface Morphology of Fine Grain Diamond Films Grown by High Repetition Rate Pulsed Laser Deposition (PLD) Technique. [C] . A.Tamanyan, G.Tamanyan, I.Andrienko, The Meeting of the Electrochemical Society . 2003

机译：高重复脉冲激光沉积（PLD）技术生长过程的生长过程和表面形态研究。
5. Nucleation and growth mechanisms of copper film from MOCVD [D] . Kim, Jung-Yeul. 1994

机译：MOCVD铜膜的成核与生长机理
6. Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen [O] . Li Yang, Caiyi Jiang, Shenghui Guo, 2016

机译：新型金刚石薄膜合成策略：无氢的微波等离子体CVD法制备甲醇和氩气氛
7. Special Issue/Deposition Methods, Characterizations and Applications of Diamond Films. Growth of Diamond Thin Films Formed by Hot Filament CVD and Electron Assisted CVD. [O] . Atsuhito SAWABE 1991

机译：钻石电影的特殊问题/沉积方法，表征和应用。通过热长丝CVD和电子辅助CVD形成的金刚石薄膜的生长。

Growth mechanisms of CVD diamond films determined by a novel TEM technique.

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